Zida za Optical mu makina a lithography

Mapangidwe a Optical ali ndi ntchito zambiri m'munda wa semiconductor. Mu makina a photolithography, optical system imayang'ana kuwala kochokera ku gwero la kuwala ndikuyiyika pa silicon wafer kuti iwonetse mawonekedwe ozungulira. Choncho, mapangidwe ndi kukhathamiritsa kwa zigawo za kuwala mu photolithography system ndi njira yofunikira yopititsira patsogolo ntchito ya makina a photolithography. Zotsatirazi ndi zina mwa zigawo za kuwala zomwe zimagwiritsidwa ntchito pamakina a photolithography:

Zolinga zowonetsera
01 Cholinga chowonetsera ndi gawo lofunikira kwambiri pamakina a lithography, nthawi zambiri amakhala ndi magalasi angapo kuphatikiza magalasi owoneka bwino, ma concave lens, ndi ma prisms.
02 Ntchito yake ndikuchepetsa mawonekedwe ozungulira pa chigoba ndikuchiyika pa mtanda wophimbidwa ndi photoresist.
03 Kulondola ndi magwiridwe antchito a cholinga chowonetsera kumakhala ndi chiwongolero champhamvu pakusankha ndi mtundu wazithunzi zamakina a lithography.

galasi
01 Magalasiamagwiritsidwa ntchito kusintha njira ya kuwala ndikuwongolera kumalo oyenera.
02 M'makina a EUV lithography, magalasi ndi ofunika kwambiri chifukwa kuwala kwa EUV kumatengedwa mosavuta ndi zinthu, kotero magalasi okhala ndi kuwala kwakukulu ayenera kugwiritsidwa ntchito.
03 Kulondola kwapamwamba komanso kukhazikika kwa chowunikira kumakhudzanso kwambiri magwiridwe antchito a makina a lithography.

Zosefera
Zosefera za 01 zimagwiritsidwa ntchito kuchotsa mafunde osafunikira a kuwala, kuwongolera kulondola komanso mtundu wa njira yojambula zithunzi.
02 Posankha fyuluta yoyenera, zikhoza kutsimikiziridwa kuti kuwala kokha kwa kutalika kwake kumalowetsa makina a lithography, potero kumapangitsa kulondola ndi kukhazikika kwa ndondomeko ya lithography.

Prisms ndi zigawo zina
Kuphatikiza apo, makina a lithography amathanso kugwiritsa ntchito zida zina zowoneka bwino, monga ma prisms, polarizers, ndi zina zambiri, kuti akwaniritse zofunikira zenizeni. Kusankhidwa, kupanga ndi kupanga zigawo zowoneka bwinozi ziyenera kutsatira mosamalitsa miyezo yoyenera yaukadaulo ndi zofunikira kuti zitsimikizire kulondola kwapamwamba komanso mphamvu zamakina a lithography.

Mwachidule, kugwiritsa ntchito zida zowunikira m'makina a lithography kumafuna kupititsa patsogolo magwiridwe antchito ndi kupanga kwa makina a lithography, potero kuthandizira chitukuko chamakampani opanga ma microelectronics. Ndi chitukuko chosalekeza cha ukadaulo wa lithography, kukhathamiritsa ndi kusinthika kwa zigawo za kuwala kumaperekanso kuthekera kwakukulu pakupanga tchipisi ta m'badwo wotsatira.

Kuti mudziwe zambiri komanso malangizo a akatswiri, pitani patsamba lathu lahttps://www.jiujonoptics.com/kuti mudziwe zambiri zazinthu zathu ndi mayankho.