Mapangidwe owoneka bwino ali ndi mapulogalamu angapo mu gawo la semiconduccy. Mu makina a Photolitography, njira yamagetsi imayang'anira kuwonjezeka kwa mtengo womwe umatulutsidwa ndi gwero lowunikira ndikulonjeza za sildon chimavumbula njira yoyendera. Chifukwa chake, kapangidwe kazimisinkhu kwa zowoneka m'matumbo mu Photolitography ndi njira yofunika kwambiri yosinthira magwiridwe antchito a Photolitography. Otsatirawa ndi ena mwa zigawo zomwe zimagwiritsidwa ntchito mu Photolitography:
Kutsatira Cholinga
Cholinga cha kuphatikizira ndi gawo lofunikira kwambiri mu makina a litagraphy, nthawi zambiri amakhala ndi magalasi angapo kuphatikiza magalasi a Convex, magalasi apafupi, ndi ntchito zambiri.
02 Ntchito yake ndikutha kutsika mawonekedwe ozungulira pa chigoba ndikuyang'ana pa chofunda cholumikizidwa ndi zithunzi.
03 Kulondola ndi magwiridwe antchito omwe akuphatikizidwa kumakhala ndi chidwi choganiza bwino ndikulingalira za mtundu wa litagraphy
Kaliwo
01 Magalasiamagwiritsidwa ntchito kusintha njira yopepuka ndikuwongolera kumalo oyenera.
02 Mu EUV yowography makina ofunika kwambiri chifukwa kuwala kwa euv kumatengedwa mosavuta ndi zida, motero magalasi okhala ndi malingaliro apamwamba kwambiri.
Kulondola kwadziko lapansi komanso kukhazikika kwa chiwonetserochi kumathandizanso kwambiri pa magwiridwe antchito a litagraphy.
Zosempha
Zosefera 01 zimagwiritsidwa ntchito kuchotsa maulendo osafunikira, kukonza kulondola ndi mtundu wa Photolitography.
02 Mwa kusankha zosefera yoyenera, zitha kutsimikiziridwa kuti kuwunika kokha kwa chiwongola dzanja china chimalowa m'makina a litagray, poyankha molondola komanso kukhazikika kwa njira yowonera.
Zochita ndi zina
Kuphatikiza apo, makina a chikwatu amathanso kugwiritsa ntchito zigawo zina za arexililictory, monga zisonga, polarter, etc., kukwaniritsa zofunika zenizeni. Kusankhidwa, kupanga ndi kupanga zinthu zowona izi kuyenera kutsatira mosamalitsa miyezo yaukadaulo ndi zofunikira kuti muwonetsetse bwino kwambiri komanso kugwiritsa ntchito bwino makina.
Mwachidule. Ndi chitukuko mosalekeza mwa ukadaulo wa Litagraphy, kukhathamiritsa ndi zopeka za zigawo zikuluzikulu zidzakuthandizaninso kupanga tchipisi.
Kuti muzindikire ndi uphungu waluso komanso upangiri wa akatswiri, pitani patsamba lathu kuhttps://www.jiujonoptics.com/kuphunzira zambiri zokhudzana ndi zosempha ndi mayankho athu.
Post Nthawi: Jan-02-2025